Document Type
Article
Publication Date
2010
Keywords
Gold, Aluminium, X-ray spectroscopy, Annealing, X-ray photoelectron spectroscopy
Abstract
We have investigated the chemical interaction between a Au/V/Al/V layer structure and n-type AlN epilayers using soft x-ray photoemission, x-ray emission spectroscopy, and atomic force microscopy. To understand the complex processes involved in this multicomponent system, we have studied the interface before and after a rapid thermal annealing step. We find the formation of a number of chemical phases at the interface, including VN, metallic vanadium, aluminum oxide, and metallic gold. An interaction mechanism for metal contact formation on the entire n-Al,GaN system is proposed. ©
Publication Title
Journal of Applied Physics
Volume
108
First Page
024906
Required Publisher's Statement
Copyright 2010 American Institute of Physics
Recommended Citation
Journal of Applied Physics 108, 024906 (2010); doi: 10.1063/1.3456060
Subjects - Topical (LCSH)
Rapid thermal processing; Vanadium oxide; X-ray photoelectron spectroscopy; X-ray spectroscopy
Genre/Form
articles
Type
Text
Language
English
Format
application/pdf
