Document Type

Article

Publication Date

2010

Abstract

We have investigated the chemical interaction between a Au/V/Al/V layer structure and n-type AlN epilayers using soft x-ray photoemission, x-ray emission spectroscopy, and atomic force microscopy. To understand the complex processes involved in this multicomponent system, we have studied the interface before and after a rapid thermal annealing step. We find the formation of a number of chemical phases at the interface, including VN, metallic vanadium, aluminum oxide, and metallic gold. An interaction mechanism for metal contact formation on the entire n-Al,GaN system is proposed. ©

Publication Title

Journal of Applied Physics

Volume

108

First Page

024906

Required Publisher's Statement

Copyright 2010 American Institute of Physics

http://dx.doi.org/10.1063/1.3456060

Language

English

Format

application/pdf

Included in

Physics Commons

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